Assessment of RDL Technology at Sub-THz Frequencies
conference paper
This contribution presents the assessment of RDL technology at sub-terahertz frequencies based on polybenzoxazole (PBO) polymers. A stack of two PBO layers of 10μm thickness with 3 metallization of 5μm copper is being under development. Vias as small as 10μm and a separation of 60μm are being explored. To assess the materials and capabilities of this technology, GCPW, stripline transmission line structures are being assessed, expecting losses in the order of 1.3dB/mm and 2.1dB/mm respectively. Moreover, two resonators have been designed to enhance the accuracy of the characterization.
TNO Identifier
1028548
ISSN
21622027
ISBN
979-835037883-2
Publisher
IEEE
Source title
International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz
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