Dynamic response of the AFM cantilever as a high resolution distance sensor
conference paper
The aim of this work is to provide experimental insight into how the time response and Q-factor of distinct cantilevers changes during the approach of an atomic force microscopy (AFM) cantilever. The time response of the cantilever, which is determined from its resonant frequency and Q-factor, is one of the factors which contributes to the dynamic AFM performance. Understanding how time response changes during different stages of approach from “far in free air” to “engaged” will help in the development of a high speed and high throughput AFM.
TNO Identifier
1019054
Source title
Proceedings of the 13th International Workshop on Nanomechanical Sensing, NMC 2016, Delft, The Netherlands
Collation
2 p.
Files
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