A SAW-chemosensor for NO2 gas-concentration measurement
conference paper
A highly stable and selective SAW chemosensor has been realized. The sensor is based on a dual-delay-line oscillator, in which the delay lines are implemented in STX-quartz substrates. One delay line is provided with a chemical interface obtained by sublimation of an organic semiconductor, i. e. , metal-free phthalocyanine. The electronic system (oscillator) is stabilized by means of automatic gain control. The oscillator operates without tuning inductors and with symmetrical driving of the transducers, aiming at a (total) monolithic integration of this sensor in a ZnO-SiO//2-Si layered structure. A special feature of the sensor is that both the delay lines and the electronic system are constructed in modules. This simplifies the interchange of different delay lines and allows measurements to be performed when only the delay line is at an elevated temperature (e. g. , environmental monitoring and automobile emission control). The operating frequencies of the sensors are between 30 and 110 MHz.
Topics
TNO Identifier
229891
ISSN
0090-5607
Publisher
IEEE
Source title
IEEE 1985 Ultrasonics Symposium - Proceedings., San Francisco, CA, USA
Place of publication
New York, NY, USA
Pages
586-590
Files
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