Predictive-model-based MIMO motion control of an unstable 6-DoF hexapod stage for overlay measurements
conference paper
Topics
TNO Identifier
954827
DOI
https://dx.doi.org/10.1109/CCTA.2017.8062548
ISBN
9781509021
Publisher
Institute of Electrical and Electronics Engineers IEEE
Source title
1st Annual IEEE Conference on Control Technology and Applications, CCTA 2017, 27-30 August 2017, Kohala Coast, HI, USA
Collation
6 p.
Place of publication
Piscataway, NY, USA
Pages
726-731
Files
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