Predictive-model-based MIMO motion control of an unstable 6-DoF hexapod stage for overlay measurements
conference paper
Topics
TNO Identifier
954827
ISBN
9781509021
Publisher
Institute of Electrical and Electronics Engineers IEEE
Source title
1st Annual IEEE Conference on Control Technology and Applications, CCTA 2017, 27-30 August 2017, Kohala Coast, HI, USA
Collation
6 p.
Place of publication
Piscataway, NY, USA
Pages
726-731
Files
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