Towards a compact low-ion-energy low-pressure plasma source for clean vacuum environments

other
2019
Ushakov, A.

Veldhoven, J. van

Stodólna, A.S.

Geerits, N.

Storm, A.J.

Vlaar, J.

Brink, J.A. van

Koster, N.B.

Dekker, M.F.
TNO Identifier
961377
Repository link
https://resolver.tno.nl/uuid:5e1c3df7-b51e-4da8-870c-8de84407cb02
Publisher
TNO
Source title
The Joint Conference of XXXIV International Conference on Phenomena in Ionized Gases, XXXIV ICPIG, and the 10th International Conference on Reactive Plasmas, ICRP-10, 10-14 July 2018, Sapporo, Japan
Collation
19 p.
Place of publication
Delft
Files
To receive the publication files, please send an e-mail request to TNO Repository.