NANOMEFOS non-contact measurement machine for aspheric and freeform optics

conference paper




Henselmans, R.

Gubbels, G.P.H.

Drunen, C. van

Venrooy, B. van

Leijtens, J.A.P.
Applying freeform optics in high-end optical systems can improve system performance while decreasing the system mass, size and number of required components. Their widespread application is however held back by the lack of a suitable metrology method. TNO, TU/e and NMi VSL have therefore developed the NANOMEFOS measurement machine, capable of universal non-contact and fast measurement of aspherical and freeform optics ranging from convex to concave and from flat to freeform, up to O 500 mm, with an uncertainty below 30 nm.
Topics









Optical engineeringAsphericalFast measurementFreeform opticsFreeformsMeasurement machinesMetrology methodsNon-contactNoncontact measurementsUncertainty analysis
TNO Identifier
784942
Repository link
https://resolver.tno.nl/uuid:53dd8720-fcc3-49b6-a88c-06c847720ded
DOI
https://dx.doi.org/10.1117/12.2309250
ISSN
0277786X
ISBN
9781510616196
Publisher
SPIE
Article nr.
1056525
Source title
International Conference on Space Optics 2010, ICSO 2010, Rhodes Island, Greece, 4-8 October 2010
Editor(s)
Armandillo, E.
Cugny, B.
Karafolas, N.
Collation
6 p.
Files
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