Preface : Atomic Layer Deposition Applications 14

conference paper
2018
Roozeboom, F.

Gendt, S. de

Dendooven, J.

Elam, J.W.

Straten, P. van der

Liu, C.

Illiberi, A.
TNO Identifier
820575
Repository link
https://resolver.tno.nl/uuid:d99c0ca9-a8f4-46d8-999e-6aefa8175731
ISBN
978-1-60768-852-5
Source
ECS Transactions, 86(6), pp. 1-74.
Publisher
The Electrochemical Society
Place of publication
Pennington (NJ), USA
Pages
1-74
Files
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