Multifrequency Nanomechanical Mass Spectrometer Prototype for Measuring Viral Particles Using Optomechanical Disk Resonators
conference paper
Malvar, O.
Gil-Santos, E.
Ruz, J.J.
Sentre-Arribas, E.
Sanz-Jimenez, A.
Kosaka, P.M.
Garcia-Lopez, S.
Paulo, A.S.
Sbarra, S.
Waquier, L.
Favero, I.
Heiden, M. Van Der
Altmann, R.K.
Papanastasiou, D.
Kounadis, D.
Panagiotopoulos, I.
Mingorance, J.
Rodriguez-Tejedor, M.
Delgado, R.
Calleja, M.
Tamayo, J.
Gil-Santos, E.
Ruz, J.J.
Sentre-Arribas, E.
Sanz-Jimenez, A.
Kosaka, P.M.
Garcia-Lopez, S.
Paulo, A.S.
Sbarra, S.
Waquier, L.
Favero, I.
Heiden, M. Van Der
Altmann, R.K.
Papanastasiou, D.
Kounadis, D.
Panagiotopoulos, I.
Mingorance, J.
Rodriguez-Tejedor, M.
Delgado, R.
Calleja, M.
Tamayo, J.
Nanomechanical mass spectrometry allows characterization of analytes with broad mass range, from small proteins to bacterial cells, and with unprecedented mass sensitivity. In this work, we show a novel multifrequency nanomechanical mass spectrometer prototype designed for focusing, guiding and soft-landing of nanoparticles and viral particles on a nanomechanical resonator surface placed in vacuum. The system is compatible with optomechanical disk resonators, with an integrated optomechanical transduction method, and with the laser beam deflection technique for the measurement of the vibrations of microcantilever resonators. The prototype allows the in-vacuum alignment of resonators thanks to a dedicated visualization system. Finally, in this work, we have demonstrated the detection of gold nanoparticles, polystyrene nanoparticles and phage G viruses with optomechanical disks and microcantilever resonators. (C) 2023 IEEE.
Topics
Mass sensingMicrocantileversNanomechanical mass spectrometryDesorptionGold nanoparticlesLaser beamsMass spectrometersMass spectrometryMEMSMicroelectromechanical devicesOptomechanicsVirusesDisk resonatorIn-vacuumMicro-cantileversMulti frequencyNanomechanicalNanomechanical mass spectrometryOptomechanical disk resonatorViral particlesResonators
TNO Identifier
984361
ISSN
10846999
ISBN
9781665493086
Publisher
Institute of Electrical and Electronics Engineers Inc.
Source title
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages
153-156
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