MFIG - a Mass Filtered Ion Gauge
other
MFIG is a metrology tool for detecting low levels of contamination (Volatile Organic Compounds (VOC) and Airborne Molecular Contamination (AMC)). MFIG consist of an ion source followed by an electrostatic lens for beam focus control. After the electrostatic lens mass separation is achieved with a static magnet field. Detection is done by a Faraday cup.
TNO Identifier
977193
Publisher
TNO
Source title
IVC-22, 22nd International Vacuum Congress, Saporro, Japan, 11-16 September 2022
Collation
1 p.
Place of publication
Delft