Atmospheric Pressure Plasma Assisted Spatial ALD of Silicon Nitride

conference paper


Shen, J.

Roozeboom, F.

Mameli, A.
TNO Identifier
972431
Repository link
https://resolver.tno.nl/uuid:a12e86ee-2f2c-476b-8546-961ab361e4d4
Publisher
TNO
Collation
19 p.
Files
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