Demonstration of atomic force microscopy imaging using an integrated opto-electro-mechanical transducer
article
The low throughput of atomic force microscopy (AFM) is the main drawback in its large-scale deployment in industrial metrology. A promising solution would be based on the parallelization of the scanning probe system, allowing acquisition of the image by an array of probes operating simultaneously. A key step for reaching this goal relies on the miniaturization and integration of the sensing mechanism. Here, we demonstrate AFM imaging employing an on-chip displacement sensor, based on a photonic crystal cavity, combined with an integrated photodetector and coupled to an on-chip waveguide. This fully-integrated sensor allows high-sensitivity and high-resolution in a very small footprint and its readout is compatible with current commercial AFM systems.
TNO Identifier
959012
ISSN
03043991
Source
Ultramicroscopy, 230
Publisher
Elsevier
Article nr.
113368
Collation
6 p.
Place of publication
Amsterdam
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