On the resolution of subsurface atomic force microscopy and its implications for subsurface feature sizing

Piras, D.; Neer, P.L.M.J. van; Thijssen, R.M.T.; Sadeghian Marnani, H.

On the resolution of subsurface atomic force microscopy and its implications for subsurface feature sizing

article

2020

Piras, D.

Neer, P.L.M.J. van

Thijssen, R.M.T.

Sadeghian Marnani, H.

Topics

Stiffness Topography Contact Stiffness Imaging Contrast Lateral Resolution Quantitative Approach Research Studies Spatial Resolution Sub-Surface Imaging Subsurface Features Atomic Force Microscopy

TNO Identifier

878164

Repository link

https://resolver.tno.nl/uuid:2d3bad24-4d71-4e15-bbb1-aced4e2fc056

DOI

https://dx.doi.org/10.1063/1.5140427

ISSN

00346748

Source

Review of Scientific Instruments, 91(8)

Publisher

AIP Publishing

Article nr.

83702

Files

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On the resolution of subsurface atomic force microscopy and its implications for subsurface feature sizing

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