Direct and high-throughput fabrication of mie-resonant metasurfaces via single pulse laser interference

article










Berzins, J.

Indrisiunas, S.

Erve, K. van

Nagarajan, A.

Fasold, S.

Steinert, M.

Gerini, G.

Gecys, P.

Pertsch, T.

Bäumer, S.M.B.

Setzpfandt, F.
Topics





Dielectric nanostructuresSilicon resonatorsMetasurfacesLasre-matter interactionDirect laser interference patterningMultibeam interference
TNO Identifier
877708
Repository link
https://resolver.tno.nl/uuid:124f8d6a-0d2d-4fa0-9d84-b8fc673d7302
Source
ACS Nano, 14, pp. 6138-6149.
Publisher
American Chemical Society ACS
Collation
12 p.
Pages
6138-6149
Files
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