Quantitative tomography with subsurface scanning ultrasound resonance force microscopy

other
2019
Es, M.H. van

Fillinger, L.

Sadeghian Marnani, H.
Topics
Buried structuresCritical DimensionsImagingQuantitativeNOMI Nano Opto-Mechatronics Instruments Group
TNO Identifier
873651
Repository link
https://resolver.tno.nl/uuid:2ce5cd95-cc22-490f-8962-15efd93ebbf2
Publisher
SPIE
Source title
Proceedings of Metrology, Inspection, and Process Control for Microlithography XXXIII, San Jose, CA, USA, 25-28 February 2019
Collation
26 p.
Files