Infrared and Optical Emission Spectroscopy on Atmospheric-Pressure Plasma-Enhanced Spatial ALD of Al2O3

other
2019
Mione, M.A.

Creyghton, Y.

Engeln, R.

Kessels, W.M.M.

Roozeboom, F.
Topics
Atomic layer etchingALEInfrared spectroscopyAtomic layer depositionSpatial ALDEtching
TNO Identifier
870177
Repository link
https://resolver.tno.nl/uuid:7bb77c33-1553-4a48-a3c0-42133b6b96a1
Collation
1 p.
Files
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