On-chip photocurrent displacement sensor based on a waveguide-coupled nanomechanical photonic crystal cavity
conference paper
A nano-opto-electro-mechanical transducer for displacement sensing is presented. It consists of a double-membrane photonic crystal cavity integrated with electro-optical read-out and on-chip light-delivery. The operation is demonstrated by atomic force microscope actuation and photocurrent sensing.
TNO Identifier
870061
ISBN
9781728104690
Publisher
Institute of Electrical and Electronics Engineers IEEE
Article nr.
8871530
Source title
Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019, Munich, Germany, 23-27 June 2019
Collation
2 p.
Files
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