Setup of a confocal nanoscope in reflection using a super-oscillatory lens
conference paper
In this paper, we discuss the setup of a confocal nanoscope in reflection using a super-oscillatory lens (SOL)which offers a sub-diffracted focal spot with an ultra-short depth of focus (≈100 nm). A tolerance of 20 nm defocussing in a 10 μm travel range is thus necessary, translating to an alignment requirement of the stage, with respect to the optical axis, below 2 mrad. We discuss an iterative procedure to fine tune the stage movement to achieve this requirement. We also demonstrate the necessity of the alignment by imaging a 5μm long 1D array of rectangular shaped Au nanostructures with a periodicity of 500 nm.
TNO Identifier
869626
ISSN
0277786X
ISBN
9781510628717
Publisher
SPIE
Article nr.
110892E
Source title
Proceedings of SPIE, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVI, 11-14 August 2019, San Diego, CA, USA
Collation
6 p.
Files
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