Atomic Layer Deposition Applications 15

conference paper
2019
Roozeboom, F.

Gendt, S. de

Dendooven, J.

Elam, J.W.

Straten, O. van der

Liu, C.

Sundaram, G.

Illiberi, A.
TNO Identifier
868853
Repository link
https://resolver.tno.nl/uuid:ac86d0dd-03d8-4541-8e1f-b95cfae265e8
ISSN
19386737
ISBN
978-160768539-5
Source
ECS Transactions, 92(3)
Publisher
The Electrochemical Society
Collation
67 p.
Place of publication
Pennington (NJ), USA
Files
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