Assisted Diagnostics Methodology for Complex High-Tech Applications
conference paper
Controlling the operations and resolving product performance issues in today’s high-tech production systems, such as semiconductor fabs, becomes a cumbersome task, even for experienced field engineers. To address the pressing need for assisted diagnostics approaches, in this paper we propose a model-based step-wise methodology, based on domain-specific languages and Bayesian networks, to capture domain knowledge and allow automated and guided reasoning in complex end-to-end diagnostics flow. We illustrate the methodology components and show its applied strength in a real industrial setting of semiconductor production chains.
Topics
TNO Identifier
868461
ISBN
9781728147819
Publisher
Institute of Electrical and Electronics Engineers Inc.
Article nr.
8987704
Source title
2019 4th International Conference on System Reliability and Safety, ICSRS 2019, 4th International Conference on System Reliability and Safety, ICSRS 2019, 20 November 2019 through 22 November 2019
Collation
7 p.
Pages
457-463
Files
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