Development of a sample clamp for GHZ subsurface probe microscopy

other
2019
Neer, P.L.M.J. van

Riel, M.C.J.M. van

Es, M.H. van

Shoeibi Omrani, P.S.

Hatakeyama, K.

Mohtashami, A.

Quesson, B.A.J.

Lans, M.J. van der

Sadeghian Marnani, H.
Topics
GHZ subsurface probe microscopyMicroscopySample clampERP Early Research ProgramERP 3D Nanomanufacturing Instruments
TNO Identifier
868201
Repository link
https://resolver.tno.nl/uuid:52aafe1a-7ec4-4879-ad8e-c47238f551d8
Publisher
TNO
Source title
SID Semicon Innovation Day, Science Centre Delft, 21 May 2019
Collation
1 p.
Place of publication
Delft
Files
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