A comprehensive model for transient behavior of tapping mode atomic force microscope
article
Many investigations have focused on steady-state nonlinear dynamics of cantilevers in tapping mode atomic force microscopy (TM-AFM). However, a transient dynamic model?which is essential for a model-based control design?is still missing. In this paper, we derive a mathematical model which covers both the transient and steady-state behavior. The steady-state response of the proposed model has been validated with existing theories. Its transient response, however, which is not covered with existing theories, has been successfully verified with experiments. Besides enabling model-based control design for TM-AFM, this model can explain the high-end aspects of AFM such as speed limitation, image quality, and eventual chaotic behavior.
Topics
TNO Identifier
868194
ISSN
0924090X
Source
Nonlinear Dynamics
Publisher
Springer
Collation
17 p.
Place of publication
New York
Files
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