Deep subsurface imaging with subsurface probe micro-scopy @ GHZ

other
2019
Neer, P.L.M.J. van

Es, M.H. van

Piras, D.

Navarro, V.

Mohtashami, A.

Lans, M.J. van der

Sadeghian Marnani, H.
This work details the initial simulation and experimental GHz SPM work carried out at TNO.
Topics
Deep surface imagingMicroscopyGHz SPMAtomic Force Microsopy (AFM)Subsurface Probe Microscopy (SSPM)ERP Early Research ProgramERP 3D Nanomanufacturing Instruments
TNO Identifier
867691
Repository link
https://resolver.tno.nl/uuid:a1fb7150-6b71-4868-bf46-c8cddcbaf297
Publisher
TNO
Source title
SID Semicon Innovation Day, Science Centre Delft, 21 May 2019
Collation
1 p.
Place of publication
Delft
Files
To receive the publication files, please send an e-mail request to TNO Repository.