Electrostatically actuated probes for Scanning Subsurface Ultrasonic Resonance Frequency Microscopy
other
Scanning Subsurface Ultrasonic Force Microscopy (SSURFM) relies on high frequency ultrasound in combination with Atomic Force Microscopy to detect viscoelastic properties of buried materials with high spatial resolution. The key ingredient is a very high frequency ultrasound wave which is amplitude modulated at the sensing cantilevers resonance frequency.
Topics
TNO Identifier
867690
Publisher
TNO
Source title
SID Semicon Innovation Day, Science Centre Delft, 21 May 2019
Collation
1 p.
Place of publication
Delft