Feasibility of Top Actuated Scattering Based Subsurface Scanning Probe Microscopy (SSPM)

other
2019
Neer, P.L.M.J. van

Quesson, B.A.J.

Es, M.H. van

Piras, D.

Lans, M.J. van der
GOAL: investigate feasibility of top actuated scattering based SSPM using simulations.
Topics
Top actuated scatteringFeasibilityMicroscopySubsurface Scanning Probe Microsopy (SSPM)ERP Early Research ProgramERP 3D Nanomanufacturing Instruments
TNO Identifier
867686
Repository link
https://resolver.tno.nl/uuid:f753bc92-30cc-4cc8-9239-33630e620f2b
Publisher
TNO
Source title
SID Semicon Innovation Day, Science Centre Delft, 21 May 2019
Collation
1 p.
Place of publication
Delft
Files
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