High Resolution SubSurface Probe Microscopy for node5 applications
other
Imaging of nanoscale structures buried in a covering material is an extremely challenging task, but is also considered extremely important. From fundamental research into living cells structures, to process control in semiconductor manufacturing, many fields would benefit from the capability to image nanoscale structures through arbitrary (opaque) covering layers. We have shown that combining Atomic Force Microscopy with ultrasound in a technology called Scanning Subsurface Probe Microscopy (SSPM) is a promising technology to enable such imaging.
Topics
TNO Identifier
867685
Publisher
TNO
Source title
SID Semicon Innovation Day, Science Centre Delft, 21 May 2019
Collation
1 p.
Place of publication
Delft