Towards Quantitative Stiffness based Subsurface AFM
other
In order to make stiffness based subsurface AFM a quantitative imaging modality, the experimental subsurface measurement must be interpreted with a versatile forward (and inverse) model. We have developed a fully parametric finite element model framework for the quantification of critical dimensions relevant in semicon applications. After identification of the most relevant geometrical parameters, we have made a versatile tool to be used for the analysis and prediction of complex layouts that are relevant for the semiconductor industry. The framework is built and executed in the COMSOL Multiphysics/MATLAB interface.
Topics
TNO Identifier
867667
Publisher
TNO
Source title
SID Semicon Innovation Day, Science Centre Delft, 21 May 2019
Collation
1 p.
Place of publication
Delft
Files
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