Advanced Processing for Quantitative Sub-surface Data Extraction
other
The TNO Optomechatronics Department is developing various Scanning Probe Microscopy (SPM) techniques, including Sub-surface Atomic Force Microscopy (AFM), as a way to address challenges for nondestructive quality control of optically opaque samples. To support the research and technical developments and to extract quantitative data CD metrology on manufactured devices using subsurface measurements, we have developed a userfriendly processing toolbox including a broad variety of scriptable image processing techniques. This toolbox enables the extraction of quantitative parameters (like pitch, orientation, width, LER, LWR, OL), from the recorded images.
Topics
TNO Identifier
867665
Publisher
TNO
Source title
SID Semicon Innovation Day, Science Centre Delft, 21 May 2019
Collation
1 p.
Place of publication
Delft