Frequency Modulation Sub-surface Atomic Force Microscopy

other
2019
Keyvani Janbahan, A.

Tamer, M.S.

Es, M.H. van

Lans, M.J. van der
Elasticity based Sub- surface Atomic Force Microscopy is a promising metrology solution for CD measurements, defect characterization and alignment and overlay applications.
Topics
FrequencyFrequency modulationMicroscopySub-surface atomic force microscopyERP Early Research ProgramERP 3D Nanomanufacturing Instruments
TNO Identifier
867662
Repository link
https://resolver.tno.nl/uuid:fe79e9ef-58b5-4a81-aa6e-52885e564260
Publisher
TNO
Source title
SID Semicon Innovation Day, Science Centre Delft, 21 May 2019
Collation
1 p.
Place of publication
Delft
Files