Advanced excitation waveforms in ultrasound sub-surface atomic force microscopy
other
This technique uses an Atomic force microscope (AFM) to map the elastic properties of buried materials with high spatial resolution. Ultrasound excitation is applied to the tip-sample interface in the AFM, while the probe’s dynamic response is monitored. The excitation is a carrier of high frequency fc, that is amplitude-modulated at a lower frequency fm, at which the probe is sensitive. The amplitude and phase of the probe’s down-mixed response at fm is a function of elastic properties of surface and sub-surface structures.This project investigated developing advanced excitation waveforms for ultrasonic sub-surface AFM that significantly improve the strength of probe’s down-mixed response.
Topics
TNO Identifier
867661
Publisher
TNO
Source title
SID Semicon Innovation Day, Science Centre Delft, 21 May 2019
Collation
1 p.
Place of publication
Delft
Files
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