Photo Thermal Acoustic Imaging for Sub-Surface Inspection and Alignment

other
2019
Koek, W.D.

Zwet, E.J. van

Plissi, M.

Eschen, M.

Piras, D.

Neer, P.L.M.J. van

Lans, M.J. van der
We have developed a photo thermal acoustic imaging (PTAI)setup and have applied it for the characterization of sub surface features composed of materials which are commonly used in the semiconductor industry. Photo thermal acoustic imaging (PTAI) is a measurement technique that combines the practical advantages of an optical technique (non-contact, charge-free and non-ionizing), with the advantages of a gigahertz-terahertz ultrasound technique such as nanometer scale resolution and a large penetration depth in optically opaque materials.
Topics
Photo Thermal Acoustic ImagingSub-Surface InspectionPTAISemiconductor industryERP Early Research ProgramERP 3D Nanomanufacturing Instruments
TNO Identifier
867655
Repository link
https://resolver.tno.nl/uuid:d8ac9105-5f8a-44cd-bfca-264c881c3e42
Publisher
TNO
Source title
SID Semicon Innovation Day, Science Centre Delft, 21 May 2019
Collation
1 p.
Place of publication
Delft
Files
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