Simulation of Near-Field Optical Inspection with a Solid Immersion Lens
other
TNO is currently performing a theoretical assessment of an optical system based on a Solid Immersion Lens (SIL). This contribution presents the theoretical approach and the modelling framework developed for this study.
Topics
TNO Identifier
867654
Publisher
TNO
Source title
SID Semicon Innovation Day, Science Centre Delft, 21 May 2019
Collation
1 p.
Place of publication
Delft
Files
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