Nano-precision multi-agent Maglev positioning platform
other
This project is aiming to realize miniature self-contained carriers that can independently perform positioning and scanning tasks on nano-scale. Such carriers can support agents for performing tasks such as inspection, deposition, repair, and cleaning. All at the nano-scale. The carriers can make large movements in X-and Y-direction and have a smaller range in Z, and rotations. This is sufficient to cover relevant surfaces in, for instance, semicon industry, such as wafers and reticles.
Topics
TNO Identifier
867636
Publisher
TNO
Source title
SID Semicon Innovation Day, Science Centre Delft, 21 May 2019
Collation
1 p.
Place of publication
Delft
Files
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