Production and measurement of superpolished surfaces
article
The influence of polishing time on the roughness of ultrasmooth bowl-feed-polished surfaces is studied. A large improvement of the surface quality is obtained within the first 10 minutes, but increasing the polishing time from 10 to 60 minutes did not yield a significant difference. A Linnik interference miscroscope, adapted for phase-shifting interferometry, was used for roughness measurements. Preliminary measurements have been performed with a setup determining the scattered intensity within a small solid angle. This relatively simple setup, which is also suitable for uncoated glass surfaces, clearly showed the improvement of surface quality by bowl-feed polishing.
TNO Identifier
282277
ISSN
0091-3286
Source
Optical engineering, 31(5), pp. 1086-1092.
Publisher
SPIE
Collation
7 p.
Pages
1086-1092
Files
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