Atomic Layer Etching&Area-Selective Atomic Layer Deposition

other
2019
Roozeboom, F.
Topics
Atomic layer etchingALEAtomic layer depositionALDArea-selective deposition
TNO Identifier
862234
Repository link
https://resolver.tno.nl/uuid:bb204341-b4c1-4ce6-aa0d-d309fca6a9cc
Collation
44 p.
Files
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