Linear approximation for measurement errors in phase shifting interferometry
article
This paper shows how measurement errors in phase shifting interferometry (PSI) can be described to a high degree of accuracy in a linear approximation. System error sources considered here are light source instability, imperfect reference phase shifting, mechanical vibrations, nonlinearity of the detector, and quantization of the detector signal. The measurement inaccuracies resulting from these errors are calculated in linear approximation for several formulas commonly used for PSI. The results are presented in tables for easy calculation of the measurement error magnitudes for known system errors. In addition, this paper discusses the measurement error reduction which can be achieved by choosing en appropriate phase calculation formula.
TNO Identifier
282196
ISSN
0003-6935
Source
Applied optics, 30(19), pp. 2718-2728.
Publisher
Optical Society of America OSA
Pages
2718-2728
Files
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