Integrated optomechanical displacement sensor based on a photonic crystal cavity
conference paper
Displacement sensing at the nanoscale is required in many applications, including accelerometry, mass sensing and atomic force microscopy. Miniaturization of the sensing elements and integration of the read-out is key in achieving low cost, high resolution and high speed. Here, we present a novel integrated nano-opto-electro-mechanical device which potentially has subnanometer resolution for displacement sensing. The proposed device is a waveguide-coupled, micron-sized, double membrane photonic crystal cavity with integrated electro-optical read-out on a single chip.
TNO Identifier
842702
ISSN
21605033
ISBN
9781509063727
Publisher
Institute of Electrical and Electronics Engineers IEEE
Article nr.
8454635
Source title
23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018, Lausanne, France, 29 July - 2 August 2018
Collation
2 p.
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