Flexible a-IGZO TFT Technology: New Developments Applications
conference paper
We present recent developments on flexible a-IGZO TFT technology scaling in terms of TFT channel length and operating voltage, as well as manufacturing cost optimization with a focus on R2R processing compatibility. We present progress on the relevant technology building blocks; (i) R2R compatible TFT architecture, (ii) (multilevel) nanoimprint lithography and (iii) S-ALD deposited TFT materials. Additionally, we show a developing application that drives scaling of the technology, namely a monolithically integrated flexible AMOLED display with in-display fingerprint detection. © 2018 FTFMD. International Society of Functional Thin Film Materials and Devices; The Japan Society of Applied Physics
Topics
TNO Identifier
842675
ISBN
9784990875350
Publisher
Institute of Electrical and Electronics Engineers Inc.
Article nr.
8437444
Source title
AM-FPD 2018 - 25th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, Proceedings, 3 July 2018 through 6 July 2018
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