Microscale diagnostics of Atmospheric Pressure Plasma-Enhanced Spatial Atomic Layer Deposition

conference paper
2018
Mione, M.A.

Creyghton, Y.

Engeln, R.

Kessels, W.M.M.

Roozeboom, F.
Topics
Atomic layer depositionSpatial ALDPlasma enhancedPE-sALD
TNO Identifier
783311
Repository link
https://resolver.tno.nl/uuid:c083dc7e-152f-4ff9-a8d7-49b2c415bffc
Collation
1 p.
Files
To receive the publication files, please send an e-mail request to TNO Repository.