Atomic Layer Deposition Applications 13 : Area-Selective Atomic Layer Deposition: Role of Surface Chemistry

conference proceedings
2017
Mameli, A.

Karasulu, B.

Verheijen, M.A.

Mackus, A.J.M.

Kessels, W.M.M.

Roozeboom, F.
Topics
Atomic layer etchingAtomic layer depositionALDApplications
TNO Identifier
780960
Repository link
https://resolver.tno.nl/uuid:0369ee49-1f63-4de8-9512-2dd470bd513a
ISSN
1938-6737
ISBN
978-1-60768-820-4
Publisher
ECS
Collation
128 p.
Files
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