Advanced defect classification by optical metrology
conference paper
The goal of the workshop is to provide a high level, invited only, international community that accelerates interactions between the main target groups: universities, institutes, entrepreneurs, intrapreneurs and investors in order to facilitate customer development, application discovery or funding start-ups & spin-offs to expand internationally. To interconnect and bring more transparency to Europe’s regional physics/chemistry clusters and innovative regional communities (such as MicronArc, MinaLogic, InPlas, NanoNextNL, MinacNed) and finally to build stronger scientific and business relationships in between.
TNO Identifier
779165
Source title
5th Workshop on Nano-fabrication, -devices and -metrology, 19-20 June 2017, Eindhoven, The Netherlands
Collation
20 p.
Files
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