A novel process for Atomic Layer Etching of ZnO using acetylacetone and remote O2 plasma
other
TNO Identifier
776434
Source title
Abstracts 17th AVS International Conference on Atomic Layer Deposition & 4th International Atomic Layer Etching Workshop (ALD - ALE 2017), Denver, USA, July 15-18, 2017
Collation
16 p.
Files
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