Large-area spatial atmospheric ALD: Al2O3 in a Gen-1 sheet-to-sheet prototype tool

other
2017
Frijters, C.

Bruele, F. van den

Grob, F.

Illiberi, A.

Creyghton, Y.

Roozeboom, F.

Poodt, P.
Topics
Atomic layer depositionSpatial ALDThin film transistorsIZOIndium zinc oxides
TNO Identifier
776077
Repository link
https://resolver.tno.nl/uuid:89b026be-8328-4ab2-9d83-7c472e47b7f2
Source title
17th AVS International Conference on Atomic Layer Deposition & 4th International Atomic Layer Etching Workshop, ALD - ALE 2017, Denver, CO, USA, 15-18 July 2017
Collation
18 p.
Files
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