InZnOgrown by atmospheric plasma-enhanced spatial atomic layer deposition for application in high-mobility TFT circuits

other
2017
Illiberi, A.

Katsouras, I.

Gazibegovic, S.

Cobb, B.

Nekovic, E.

Boekel, W. van

Frijters, C.

Maas, J.

Roozeboom, F.

Creyghton, Y.

Poodt, P.

Gelinck, G.
Topics
Atomic layer depositionALDTFT circuits
TNO Identifier
775936
Repository link
https://resolver.tno.nl/uuid:e4b8b07e-cdaf-4135-98b2-5b14a3964b88
Source title
iPlasmaNano VIII Conference, Antwerp, Belgium July 2-6, 2017
Collation
25 p.
Files
To receive the publication files, please send an e-mail request to TNO Repository.