Direct-write ALD of In2O3:H and ZnO at the micro- and nanoscale

other
2017
Mameli, A.

Karasulu, B.

Barcones, B.

Verheijen, M.A.

Mackus, A.J.M.

Kessels, W.M.M.

Roozeboom, F.
Topics
Atomic layer depositionALDDirect write
TNO Identifier
756759
Repository link
https://resolver.tno.nl/uuid:8426ddec-8aac-455a-abee-f0bb26f6cbb7
Source title
2nd Selective Area Deposition Workshop (SAD2017), Eindhoven, The Netherlands, April 20-21, 2017
Collation
1 p.
Files
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