Outlook for NanoInside Theme "3D nano-structuring and metrology"
report
The field of 3D nano-structuring and metrology is advancing rapidly in the Netherlands and the rest of the world. In general, the quality of the involved investigators, knowledge institutes and companies in the Netherlands is world-class. Many Dutch academic groups / knowledge institutes / companies are world-leading in their own nano-arena. A practical partitioning of the field is in three clusters: a) Nanomaterials - “3D nano in larger volumes” Manufacturing and application of repetitive functional nanostructures over large areas and in large volumes, to enable e.g. more efficient photovoltaics, catalysts or personalized biomedical diagnostics. Major challenges exist in improving affordability of large-area 3D nano-structuring; b) Semiconductor industry - “3D nano for ICT” Continued development of patterning, metrology and analysis for next-generation-ICs with complex 3D-nanostructures (“switches”) inside. Requirements for patterning, metrology and analysis equipment get increasingly strict. Major themes, next to “More Moore”, are “Hybridization of metrology for advanced process control” and “Metrology, from precision-toaccuracy”; c) Lab-scale nano R&D - “3D nano for the labs” Advancing technology for nano-patterning, metrology and analysis at the sub-10 nm level, thus serving science-based game changers like quantum computing, molecular storage, superconducting detectors, et cetera. Process reproducibility in labs often is significantly worse than in semicon fabs, a state of affairs that creates both challenges and opportunities for innovation.
Topics
TNO Identifier
753043
Publisher
TNO
TU Delft
TU Delft
Collation
21 p. (incl. bijl.)
Place of publication
Delft
Files
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