Characterization of electron-beam- and EUV photon-induced secondary electron emission
other
TNO is developing a carbon-contamination-insensitive EUV power sensor that uses the photo-electric effect to distinguish between in- and out-of-band EUV. An LPP EUV source also emits out-of-band (OoB) photons, generating secondary electrons (SE’s) with a different energy than the SE’s generated by in-band EUV photons (13.5 nm, 92 eV). Characterization of the SE yield and energy distribution from carbon is required for the optimization of the EUV power sensor selectivity to in-band EUV photons. To this end, we designed a Secondary Electron Energy Distribution (SEED) analyzer, to measure the SE yield and energy distribution. First, the SEED analyzer will be validated with an e-beam, then in the TNO EUV Beam Line. This research is funded by the Dutch TKI program HTSM in collaboration with ASML and Carl Zeiss.
TNO Identifier
536887
Publisher
TNO
ICCC
ICCC
Source title
NEVAC dag, 27 mei 2016, Leiden, Nederland
Collation
1 p.
Place of publication
Delft
Files
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