Helium ion beam induced growth of hammerhead AFM probes
article
The authors report the direct-write growth of hammerhead atomic force microscope (AFM) probes by He+ beam induced deposition of platinum-carbon. In order to grow a thin nanoneedle on top of a conventional AFM probe, the authors move a focused He+ beam during exposure to a PtC precursor gas. In the final growth stage, a perpendicular movement of the beam results in the required three-dimensional (hammerhead) shape. The diameter of the needle depends on the ion beam dose, beam dwell time, and speed of the beam movement. A nanoneedle radius below 10 nm and a hammerhead smaller than 35 nm have been achieved. This fabrication process is robust and enables precise control over the three-dimensions of the hammerhead AFM probe. Finally, the authors test the capabilities of the fabricated AFM probes for two-dimensional metrology of sidewall angles and line-edge roughness of trenches and shark-fins in silicon.
Topics
TNO Identifier
529832
ISSN
21662746
Source
Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, 33(6)
Publisher
American Institute of Physics AIP
Article nr.
06F503
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