Spatial atmospheric ALD of functional layers for CIGS Solar Cells
article
Spatial Atmosperic Atomic Layer Depositon combines the advantages of temporal ALD, i.e. excellent control of film composition and uniformity over large area substrates, with high growth rages (up tot nm/s). In this paper we present a short overview of our research acctivity carried out on S-ALD of functional thin filsm for the front window of copper indium gallium di-selenide (CIGS) solar cells. Zn(O,S) and ZnO:Al are grown by co-injecting the vaporized precursors of the cationic (O,S) and anionic (Zn, Al) elements, respectively. An insight on the growth characteristics and properties of Zn(O,S)and ZnO;Al is presented
TNO Identifier
528482
Source
ECS Transactions, 69(7), pp. 31-37.
Publisher
Electrochemical Society
Pages
31-37
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