Atomic Layer Deposition Applications 11 : Preface

conference paper
2015
Roozeboom, F.

Gendt, S. De

Delabie, A.

Elam, J.W.

Londergan, A.

Straten, O. van der
TNO Identifier
528464
Repository link
https://resolver.tno.nl/uuid:18e415d3-709b-485c-b14d-b425193947cf
Publisher
ECS
Source title
International symposium on Atomic Layer Deposition Applications 11, held during the 228th Meeting of the Electrochemical Society. This meeting was held from October 11-15, 2015 at the Phoenix Convention Center and the Hyatt Regency located in the center of Downtown Phoenix, Arizona.
Pages
I - VIII
Files
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