High resolution patterning for flexible electronics via roll-to-roll nanoimprint lithography

conference paper
2014
Sabik, S.

Riet, J. de

Yakimets, I.

Smits, E.
Topics
R2RRoll-to-rollNanoimprint lithographyFlexible electronicsLight managementTransparent electrodeMultilevel imprint
TNO Identifier
520134
Repository link
https://resolver.tno.nl/uuid:cc3852c0-8d0d-497b-8907-3daffb8d981f
Publisher
SPIE
Source title
Proceedings of SPIE : Alternative Lithographic Technologies VI
Editor(s)
Resnick, D.J.
Bencher, C.
Collation
9 p.
Files
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